Materials science of thin films : deposition and structure /
| Yazar: | |
|---|---|
| Materyal Türü: | Kitap |
| Dil: | English |
| Baskı/Yayın Bilgisi: |
San Diego, CA :
Academic Press,
2002.
|
| Edisyon: | 2. bs. |
| Konular: |
İçindekiler:
- A review of materials science
- Vacuum science and technology
- Thin-film evaporation processes
- Discharges, plasmas, and ion-surface interactions
- Plasma and ion beam processing of thin films
- Chamical vapor deposition
- Substrate surfaces and thin-film nucleation
- Epitaxy
- Film structure
- Characterixation of thin films and surfaces
- Interdiffusion, reactions, and transformations in thin films
- Mechanical properties of thin films.