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|a 0125249756 (alk. paper)
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|a 9780125249751 (alk. paper)
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|a TRMEMSKU
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| 049 |
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|a TR7VH
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|a TA418.9.T45
|b OHR 2002
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| 100 |
1 |
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|a Ohring, Milton,
|d 1936-
|9 200785
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| 245 |
1 |
0 |
|a Materials science of thin films :
|b deposition and structure /
|c Milton Ohring.
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| 740 |
0 |
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|a deposition and structure
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| 250 |
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|a 2. bs.
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| 260 |
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|a San Diego, CA :
|b Academic Press,
|c 2002.
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| 300 |
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|a xxi, 794 s. :
|b res. ;
|c 24 cm.
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| 504 |
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|a Bibliyografya ve dizin var.
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| 505 |
0 |
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|a A review of materials science -- Vacuum science and technology -- Thin-film evaporation processes -- Discharges, plasmas, and ion-surface interactions -- Plasma and ion beam processing of thin films -- Chamical vapor deposition -- Substrate surfaces and thin-film nucleation -- Epitaxy -- Film structure -- Characterixation of thin films and surfaces -- Interdiffusion, reactions, and transformations in thin films -- Mechanical properties of thin films.
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| 650 |
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|a Thin films.
|9 89318
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| 650 |
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4 |
|a İnce filmler.
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