APA Citation

Doering, R., & Nishi, Y. (2008). Handbook of semiconductor manufacturing technology (2. bs.). Boca Raton: CRC Press.

Chicago Style Citation

Doering, Robert, and Yoshio Nishi. Handbook of Semiconductor Manufacturing Technology. 2. bs. Boca Raton: CRC Press, 2008.

MLA Citation

Doering, Robert, and Yoshio Nishi. Handbook of Semiconductor Manufacturing Technology. 2. bs. Boca Raton: CRC Press, 2008.

Warning: These citations may not always be 100% accurate.