Doering, R., & Nishi, Y. (2008). Handbook of semiconductor manufacturing technology (2. bs.). Boca Raton: CRC Press.
Chicago Style CitationDoering, Robert, and Yoshio Nishi. Handbook of Semiconductor Manufacturing Technology. 2. bs. Boca Raton: CRC Press, 2008.
MLA CitationDoering, Robert, and Yoshio Nishi. Handbook of Semiconductor Manufacturing Technology. 2. bs. Boca Raton: CRC Press, 2008.
Warning: These citations may not always be 100% accurate.