Doering, R., & Nishi, Y. (2008). Handbook of semiconductor manufacturing technology (2. bs.). Boca Raton: CRC Press.
Chicago Stili AlıntıDoering, Robert, and Yoshio Nishi. Handbook of Semiconductor Manufacturing Technology. 2. bs. Boca Raton: CRC Press, 2008.
MLA AlıntıDoering, Robert, and Yoshio Nishi. Handbook of Semiconductor Manufacturing Technology. 2. bs. Boca Raton: CRC Press, 2008.
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